Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691645 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Dmitry Lubomirsky, Ananda Seelavanth Math, Shubham Chourey | 2017-06-27 |
SN
Saravanakumar Natarajan
Overall (2017): #253,538 of 506,227Top 55%
1
Patents 2017