Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |