Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773648 | Dual discharge modes operation for remote plasma | Yi-Heng Sen, Soonam Park, Dmitry Lubomirsky | 2017-09-26 |
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Sultan Malik, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi +2 more | 2017-08-08 |
| 9659753 | Grooved insulator to reduce leakage current | Sang Won Kang, Dongqing Yang, Raymond W. Lu, Peter M. Hillman, Nicholas Celeste +3 more | 2017-05-23 |