| 9846130 |
Ceramic ring test device |
Satoru Kobayashi, Yufei Zhu, Saurabh Garg, Dmitry Lubomirsky |
2017-12-19 |
| 9837249 |
Radial waveguide systems and methods for post-match control of microwaves |
Satoru Kobayashi, Dmitry Lubomirsky, Hideo Sugai |
2017-12-05 |
| 9773648 |
Dual discharge modes operation for remote plasma |
Tae Seung Cho, Yi-Heng Sen, Dmitry Lubomirsky |
2017-09-26 |
| 9728437 |
High temperature chuck for plasma processing systems |
Toan Q. Tran, Sultan Malik, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi +2 more |
2017-08-08 |
| 9711366 |
Selective etch for metal-containing materials |
Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Xikun Wang, Jeffrey W. Anthis |
2017-07-18 |
| 9659753 |
Grooved insulator to reduce leakage current |
Tae Seung Cho, Sang Won Kang, Dongqing Yang, Raymond W. Lu, Peter M. Hillman +3 more |
2017-05-23 |
| 9593421 |
Particle generation suppressor by DC bias modulation |
Jonghoon Baek, Xinglong Chen, Dmitry Lubomirsky |
2017-03-14 |
| 9564296 |
Radial waveguide systems and methods for post-match control of microwaves |
Satoru Kobayashi, Dmitry Lubomirsky, Hideo Sugai |
2017-02-07 |
