Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773648 | Dual discharge modes operation for remote plasma | Tae Seung Cho, Soonam Park, Dmitry Lubomirsky | 2017-09-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773648 | Dual discharge modes operation for remote plasma | Tae Seung Cho, Soonam Park, Dmitry Lubomirsky | 2017-09-26 |