Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768051 | Wafer clamping apparatus | Dali Liu, Sung Ho JANG, Yong-Ho Lim | 2017-09-19 |
| 9741545 | RPS assisted RF plasma source for semiconductor processing | Saurabh Garg, Jang-Gyoo Yang | 2017-08-22 |
| 9704723 | Processing systems and methods for halide scavenging | Anchuan Wang, Zihui Li, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2017-07-11 |
| 9659792 | Processing systems and methods for halide scavenging | Anchuan Wang, Zihui Li, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2017-05-23 |
| 9593421 | Particle generation suppressor by DC bias modulation | Jonghoon Baek, Soonam Park, Dmitry Lubomirsky | 2017-03-14 |