Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711366 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Jeffrey W. Anthis | 2017-07-18 |
| 9659791 | Metal removal with reduced surface roughness | David Cui, Anchuan Wang, Nitin K. Ingle | 2017-05-23 |
| 9607856 | Selective titanium nitride removal | Anchuan Wang, Nitin K. Ingle, Dmitry Lubomirsky | 2017-03-28 |
| 9553102 | Tungsten separation | Jie Liu, Anchuan Wang, Nitin K. Ingle | 2017-01-24 |
| 9540736 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Jie Liu +1 more | 2017-01-10 |