Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576788 | Cleaning high aspect ratio vias | Seung Ho Park, Anchuan Wang, Zhenjiang Cui, Nitin K. Ingle | 2017-02-21 |
| 9576809 | Etch suppression with germanium | Mikhail Korolik, Nitin K. Ingle, Jingchun Zhang, Anchuan Wang | 2017-02-21 |
| 9553102 | Tungsten separation | Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2017-01-24 |
| 9540736 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2017-01-10 |