Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842744 | Methods for etch of SiN films | Anchuan Wang, Nitin K. Ingle | 2017-12-12 |
| 9754800 | Selective etch for silicon films | Anchuan Wang, Nitin K. Ingle | 2017-09-05 |
| 9576809 | Etch suppression with germanium | Mikhail Korolik, Nitin K. Ingle, Anchuan Wang, Jie Liu | 2017-02-21 |
| 9564338 | Silicon-selective removal | Hanshen Zhang | 2017-02-07 |