Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799533 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2017-10-24 |
| 9611552 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Jeffrey W. Anthis, Glen Gilchrist | 2017-04-04 |
| 9540736 | Methods of etching films with reduced surface roughness | Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang, Jie Liu +1 more | 2017-01-10 |