TC

Tsung-Liang Chen

VA Varian Semiconductor Equipment Associates: 2 patents #27 of 139Top 20%
📍 Zhubeikou, MA: #2 of 2 inventorsTop 100%
Overall (2017): #96,841 of 506,227Top 20%
2
Patents 2017

Issued Patents 2017

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9706634 Apparatus and techniques to treat substrates using directional plasma and reactive gas Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell +3 more 2017-07-11
9611552 System and method for controllable non-volatile metal removal Benjamin Schmiege, Jeffrey W. Anthis, Glen Gilchrist 2017-04-04