Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9767987 | Method and system for modifying substrate relief features using ion implantation | Ludovic Godet, Patrick M. Martin, Timothy J. Miller | 2017-09-19 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Vijayakumar C. Venugopal, Richard J. Hertel, Ernest E. Allen | 2017-03-07 |