Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Richard J. Hertel, Vikram Singh, Ernest E. Allen | 2017-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Richard J. Hertel, Vikram Singh, Ernest E. Allen | 2017-03-07 |