Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2017-07-11 |
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Vijayakumar C. Venugopal, Vikram Singh, Ernest E. Allen | 2017-03-07 |