Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740104 | Plasma dry strip pretreatment to enhance ion implanted resist removal | Ivan L. Berry, III | 2017-08-22 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |