Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837254 | Differentially pumped reactive gas injector | Thorsten Lill, Kenneth R. Reynolds | 2017-12-05 |
| 9812349 | Control of the incidence angle of an ion beam on a substrate | Ivelin Angelov | 2017-11-07 |
| 9779955 | Ion beam etching utilizing cryogenic wafer temperatures | Thorsten Lill, Anthony J. Ricci | 2017-10-03 |
| 9740104 | Plasma dry strip pretreatment to enhance ion implanted resist removal | Glen F. R. Gilchrist | 2017-08-22 |
| 9543150 | Systems and methods for forming ultra-shallow junctions | Yunsang Kim, YounGi Hong | 2017-01-10 |
| 9536748 | Use of ion beam etching to generate gate-all-around structure | Thorsten Lill | 2017-01-03 |