Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812349 | Control of the incidence angle of an ion beam on a substrate | Ivan L. Berry, III | 2017-11-07 |
| 9679749 | Gas distribution device with actively cooled grid | Serge Kosche | 2017-06-13 |