Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779955 | Ion beam etching utilizing cryogenic wafer temperatures | Thorsten Lill, Ivan L. Berry, III | 2017-10-03 |
| 9728429 | Parasitic plasma prevention in plasma processing chambers | Saurabh Ullal, Larry D. Martinez | 2017-08-08 |
| 9673025 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Henry Povolny | 2017-06-06 |