Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824904 | Method and apparatus for controlling spatial temperature distribution | Robert Steger | 2017-11-21 |
| 9775194 | Multiplexed heater array using AC drive for semiconductor processing | John Pease | 2017-09-26 |
| 9767996 | Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmas | Robert Griffith O'Neill, Jie Zhang | 2017-09-19 |
| 9673025 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Henry Povolny, Anthony J. Ricci | 2017-06-06 |
| 9646861 | Heating plate with heating zones for substrate processing and method of use thereof | Harmeet Singh, Keith Gaff, Keith Comendant | 2017-05-09 |