Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673025 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Neil Benjamin, Anthony J. Ricci | 2017-06-06 |
| 9652567 | System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path | John C. Valcore, Jr. | 2017-05-16 |