| 9842725 |
Using modeling to determine ion energy associated with a plasma system |
Bradford J. Lyndaker |
2017-12-12 |
| 9837252 |
Systems and methods for using one or more fixtures and efficiency to determine parameters of a match network model |
Arthur M. Howald |
2017-12-05 |
| 9831071 |
Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network model |
Arthur M. Howald |
2017-11-28 |
| 9831065 |
Computation of statistics for statistical data decimation |
Andrew Fong |
2017-11-28 |
| 9812294 |
Sub-pulsing during a state |
Harmeet Singh, Bradford J. Lyndaker |
2017-11-07 |
| 9779196 |
Segmenting a model within a plasma system |
Arthur M. Howald |
2017-10-03 |
| 9720022 |
Systems and methods for providing characteristics of an impedance matching model for use with matching networks |
Arthur M. Howald, Bradford J. Lyndaker, Seyed Jafar Jafarian-Tehrani |
2017-08-01 |
| 9711332 |
Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator |
Arthur M. Howald, Andrew Fong, David Hopkins |
2017-07-18 |
| 9673026 |
Edge ramping |
Bradford J. Lyndaker, Andrew Fong |
2017-06-06 |
| 9667303 |
Dual push between a host computer system and an RF generator |
Tony San, Andrew Fong |
2017-05-30 |
| 9652567 |
System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path |
Henry Povolny |
2017-05-16 |
| 9627186 |
System, method and apparatus for using optical data to monitor RF generator operations |
Tony San, Seonkyung Lee |
2017-04-18 |
| 9627182 |
Tuning a parameter associated with plasma impedance |
Bradford J. Lyndaker |
2017-04-18 |
| 9620334 |
Control of etch rate using modeling, feedback and impedance match |
Bradford J. Lyndaker, Alexei Marakhtanov, Seyed Jafar Jafarian-Tehrani, Zhigang Chen |
2017-04-11 |
| 9620337 |
Determining a malfunctioning device in a plasma system |
Bradford J. Lyndaker, Arthur H. Sato |
2017-04-11 |
| 9607810 |
Impedance-based adjustment of power and frequency |
Bradford J. Lyndaker |
2017-03-28 |
| 9594105 |
Cable power loss determination for virtual metrology |
Arthur M. Howald |
2017-03-14 |
