Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842725 | Using modeling to determine ion energy associated with a plasma system | John C. Valcore, Jr. | 2017-12-12 |
| 9812294 | Sub-pulsing during a state | John C. Valcore, Jr., Harmeet Singh | 2017-11-07 |
| 9720022 | Systems and methods for providing characteristics of an impedance matching model for use with matching networks | Arthur M. Howald, John C. Valcore, Jr., Seyed Jafar Jafarian-Tehrani | 2017-08-01 |
| 9673026 | Edge ramping | John C. Valcore, Jr., Andrew Fong | 2017-06-06 |
| 9627182 | Tuning a parameter associated with plasma impedance | John C. Valcore, Jr. | 2017-04-18 |
| 9620337 | Determining a malfunctioning device in a plasma system | John C. Valcore, Jr., Arthur H. Sato | 2017-04-11 |
| 9620334 | Control of etch rate using modeling, feedback and impedance match | John C. Valcore, Jr., Alexei Marakhtanov, Seyed Jafar Jafarian-Tehrani, Zhigang Chen | 2017-04-11 |
| 9607810 | Impedance-based adjustment of power and frequency | John C. Valcore, Jr. | 2017-03-28 |