Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Nini Munoz, Ludovic Godet, Anthony Renau | 2017-04-11 |