Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Ludovic Godet, Anthony Renau | 2017-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Ludovic Godet, Anthony Renau | 2017-04-11 |