Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847228 | Method for selectively depositing a layer on a three dimensional structure | Simon Ruffell, Thomas R. Omstead | 2017-12-19 |
| 9773636 | Apparatus and method for generating high current negative hydrogen ion beam | W. Davis Lee, Neil J. Bassom | 2017-09-26 |
| 9620335 | In situ control of ion angular distribution in a processing apparatus | Costel Biloiu, Nini Munoz, Ludovic Godet | 2017-04-11 |