Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell, Richard J. Hertel +3 more | 2017-07-11 |