Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Svetlana B. Radovanov | 2017-12-12 |
| 9793086 | SiC coating in an ion implanter | Robert J. Mason, Shardul S. Patel, Robert H. Bettencourt | 2017-10-17 |
| 9780250 | Self-aligned mask for ion implantation | Vikram M. Bhosle, Tapash Chakraborty, Prerna Goradia, Robert Jan Visser | 2017-10-03 |
| 9767987 | Method and system for modifying substrate relief features using ion implantation | Ludovic Godet, Patrick M. Martin, Vikram Singh | 2017-09-19 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Svetlana B. Radovanov | 2017-06-13 |
| 9659677 | Shielding device for substrate edge protection and method of using same | Aaron P. Webb, Charles T. Carlson, William T. Weaver, James D. Strassner | 2017-05-23 |