Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, John A. Frontiero, Timothy J. Miller, Svetlana B. Radovanov | 2017-12-12 |
| 9711316 | Method of cleaning an extraction electrode assembly using pulsed biasing | Peter F. Kurunczi | 2017-07-18 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, John A. Frontiero, Timothy J. Miller, Svetlana B. Radovanov | 2017-06-13 |