Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840772 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Timothy J. Miller | 2017-12-12 |
| 9734991 | Negative ribbon ion beams from pulsed plasmas | Daniel Distaso, Joseph P. Dzengeleski | 2017-08-15 |
| 9677171 | Method of improving ion beam quality in a non-mass-analyzed ion implantation system | Bon-Woong Koo, Christopher J. Leavitt, John A. Frontiero, Timothy J. Miller | 2017-06-13 |
| 9613777 | Uniformity control using adjustable internal antennas | Alexandre Likhanskii | 2017-04-04 |
| 9536712 | Apparatus and method for mass analyzed ion beam | W. Davis Lee, Peter F. Kurunczi | 2017-01-03 |