Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761410 | Apparatus and method for in-situ cleaning in ion beam apparatus | Jay T. Scheuer, William Davis Lee | 2017-09-12 |
| 9721750 | Controlling contamination particle trajectory from a beam-line electrostatic element | William Davis Lee | 2017-08-01 |
| 9685298 | Apparatus and method for contamination control in ion beam apparatus | Jay T. Scheuer, William Davis Lee | 2017-06-20 |
| 9613777 | Uniformity control using adjustable internal antennas | Svetlana B. Radovanov | 2017-04-04 |