Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847240 | Constant mass flow multi-level coolant path electrostatic chuck | — | 2017-12-19 |
| 9824846 | Dual material repeller | Alexander S. Perel, David Sporleder | 2017-11-21 |
| 9805931 | Liquid immersion doping | Frank Sinclair, Jay T. Scheuer, Peter L. Kellerman | 2017-10-31 |
| 9761410 | Apparatus and method for in-situ cleaning in ion beam apparatus | Alexandre Likhanskii, Jay T. Scheuer | 2017-09-12 |
| 9721750 | Controlling contamination particle trajectory from a beam-line electrostatic element | Alexandre Likhanskii | 2017-08-01 |
| 9711324 | Inert atmospheric pressure pre-chill and post-heat | Steve Drummond | 2017-07-18 |
| 9685298 | Apparatus and method for contamination control in ion beam apparatus | Alexandre Likhanskii, Jay T. Scheuer | 2017-06-20 |
| 9633885 | Variable electrode pattern for versatile electrostatic clamp operation | — | 2017-04-25 |
| 9624574 | Platen with multiple shaped grounding structures | — | 2017-04-18 |
| 9583308 | Light bath for particle suppression | — | 2017-02-28 |
| 9558980 | Vapor compression refrigeration chuck for ion implanters | Ashwin M. Purohit, Marvin R. LaFontaine | 2017-01-31 |