Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799533 | Methods of etching films comprising transition metals | Benjamin Schmiege, David Thompson | 2017-10-24 |
| 9768013 | Apparatus and method for selective deposition | Abhishek Dube, Schubert S. Chu, Jessica S. Kachian, David Thompson | 2017-09-19 |
| 9721787 | Film deposition using tantalum precursors | David Thompson | 2017-08-01 |
| 9711366 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Xikun Wang | 2017-07-18 |
| 9683287 | Deposition of films comprising aluminum alloys with high aluminum content | David Thompson, Srinivas Gandikota, Xinliang Lu, Wei V. Tang, Jing Zhou +6 more | 2017-06-20 |
| 9611552 | System and method for controllable non-volatile metal removal | Tsung-Liang Chen, Benjamin Schmiege, Glen Gilchrist | 2017-04-04 |
| 9580799 | Nitrogen-containing ligands and their use in atomic layer deposition methods | David Thompson | 2017-02-28 |
| 9540736 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Xikun Wang, Jie Liu +1 more | 2017-01-10 |