Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805942 | Method of modifying epitaxial growth shape on source drain area of transistor | Yihwan Kim, Xuebin Li | 2017-10-31 |
| 9768013 | Apparatus and method for selective deposition | Schubert S. Chu, Jessica S. Kachian, David Thompson, Jeffrey W. Anthis | 2017-09-19 |
| 9704708 | Halogenated dopant precursors for epitaxy | Yihwan Kim, Xuebin Li | 2017-07-11 |