Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666414 | Process chamber for etching low k and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Ellie Yieh | 2017-05-30 |
| 9601301 | Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment | Chinh Dinh, Andrew Nguyen, Michael G. Chafin | 2017-03-21 |