Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601301 | Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment | Sergey G. Belostotskiy, Chinh Dinh, Andrew Nguyen | 2017-03-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601301 | Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment | Sergey G. Belostotskiy, Chinh Dinh, Andrew Nguyen | 2017-03-21 |