| 9793193 |
Air gap and air spacer pinch off |
Griselda Bonilla, Elbert E. Huang, Son V. Nguyen, Takeshi Nogami, Christopher J. Penny |
2017-10-17 |
| 9786760 |
Air gap and air spacer pinch off |
Griselda Bonilla, Elbert E. Huang, Son V. Nguyen, Takeshi Nogami, Christopher J. Penny |
2017-10-10 |
| 9754891 |
Low-temperature diffusion doping of copper interconnects independent of seed layer composition |
Benjamin D. Briggs, Lawrence A. Clevenger, Chao-Kun Hu, Takeshi Nogami, Michael Rizzolo |
2017-09-05 |
| 9735005 |
Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices |
Thomas J. Haigh, Jr., Son V. Nguyen, Hosadurga Shobha |
2017-08-15 |
| 9711455 |
Method of forming an air gap semiconductor structure with selective cap bilayer |
Stephen M. Gates, Elbert E. Huang, Dimitri Kioussis, Christopher J. Penny |
2017-07-18 |
| 9711456 |
Composite manganese nitride/low-K dielectric cap |
Donald F. Canaperi, Son V. Nguyen, Takeshi Nogami |
2017-07-18 |
| 9711507 |
Separate N and P fin etching for reduced CMOS device leakage |
Isabel Cristina Chu, Lawrence A. Clevenger, Leigh Anne H. Clevenger, Mona A. Ebrish, Gauri Karve +3 more |
2017-07-18 |
| 9691705 |
Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects |
Donald F. Canaperi, Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami +1 more |
2017-06-27 |
| 9620481 |
Substrate bonding with diffusion barrier structures |
Daniel C. Edelstein, Douglas C. La Tulipe, Jr., Wei Lin, Spyridon Skordas, Tuan A. Vo +1 more |
2017-04-11 |
| 9607825 |
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication |
Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Hosadurga Shobha +1 more |
2017-03-28 |
| 9601371 |
Interconnect structure with barrier layer |
Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Hosadurga Shobha |
2017-03-21 |
| 9558934 |
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication |
Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Hosadurga Shobha +1 more |
2017-01-31 |
| 9558935 |
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication |
Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Hosadurga Shobha +1 more |
2017-01-31 |
| 9536733 |
Hydrogen-free silicon-based deposited dielectric films for nano device fabrication |
Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Hosadurga Shobha +1 more |
2017-01-03 |
