Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754798 | Hybridization fin reveal for uniform fin reveal depth across different fin pitches | Zhenxing Bi, Thamarai S. Devarajan, Sivananda K. Kanakasabapathy, Fee Li Lie, Peng Xu | 2017-09-05 |
| 9711456 | Composite manganese nitride/low-K dielectric cap | Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini | 2017-07-18 |
| 9691705 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2017-06-27 |
| 9679780 | Polysilicon residue removal in nanosheet MOSFETs | Zhenxing Bi, Thamarai S. Devarajan, Nicolas Loubet | 2017-06-13 |
| 9640514 | Wafer bonding using boron and nitrogen based bonding stack | Wei Lin, Troy L. Graves-Abe, Spyridon Skordas, Matthew T. Shoudy, Binglin Miao +2 more | 2017-05-02 |
| 9607825 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-03-28 |
| 9558935 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-31 |
| 9558934 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-31 |
| 9536733 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-03 |