Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9806023 | Selective and non-selective barrier layer wet removal | Benjamin D. Briggs, Elbert E. Huang, Raghuveer R. Patlolla, Cornelius Brown Peethala, David L. Rath | 2017-10-31 |
| 9735005 | Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices | Thomas J. Haigh, Jr., Son V. Nguyen, Deepika Priyadarshini | 2017-08-15 |
| 9691705 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Alfred Grill, Son V. Nguyen, Takeshi Nogami +1 more | 2017-06-27 |
| 9685406 | Selective and non-selective barrier layer wet removal | Benjamin D. Briggs, Elbert E. Huang, Raghuveer R. Patlolla, Cornelius Brown Peethala, David L. Rath | 2017-06-20 |
| 9607825 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini +1 more | 2017-03-28 |
| 9601371 | Interconnect structure with barrier layer | Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini | 2017-03-21 |
| 9558935 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini +1 more | 2017-01-31 |
| 9558934 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini +1 more | 2017-01-31 |
| 9536733 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Alfred Grill, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini +1 more | 2017-01-03 |