Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768288 | Carbon nanostructure device fabrication utilizing protect layers | Jack O. Chu, Christos D. Dimitrakopoulos, Timothy J. McArdle, Dirk Pfeiffer, Katherine L. Saenger +1 more | 2017-09-19 |
| 9698043 | Shallow trench isolation for semiconductor devices | Kevin K. Chan, Stephan A. Cohen, Deborah A. Neumayer | 2017-07-04 |
| 9691705 | Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects | Donald F. Canaperi, Daniel C. Edelstein, Son V. Nguyen, Takeshi Nogami, Deepika Priyadarshini +1 more | 2017-06-27 |
| 9607825 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-03-28 |
| 9590054 | Low temperature spacer for advanced semiconductor devices | Kevin K. Chan, Deborah A. Neumayer, Dae-Gyu Park, Norma E. Sosa, Min Yang | 2017-03-07 |
| 9558935 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-31 |
| 9558934 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-31 |
| 9536733 | Hydrogen-free silicon-based deposited dielectric films for nano device fabrication | Donald F. Canaperi, Sanjay C. Mehta, Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha +1 more | 2017-01-03 |