Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835665 | Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method | Nobuyuki Mise, Ryoji Nishio, Tatehito Usui | 2004-12-28 |
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6825617 | Semiconductor processing apparatus | Seiichiro Kanno, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Hideyuki Yamamoto | 2004-11-30 |
| 6759338 | Plasma processing apparatus and method | Yutaka Ohmoto, Hironobu Kawahara, Kazue Takahashi, Saburou Kanai | 2004-07-06 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai, Tsutomu Tetsuka +3 more | 2004-06-29 |
| 6752580 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2004-06-22 |
| 6752579 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2004-06-22 |
| 6705828 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2004-03-16 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2004-01-13 |
| 6672819 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2004-01-06 |