Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6755935 | Plasma processing apparatus | Hideyuki Kazumi, Ichiro Sasaki, Kenji Maeda, Hironobu Kawahara | 2004-06-29 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai +3 more | 2004-06-29 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Seiichiro Kanno, Ryoji Nishio, Junichi Tanaka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |