Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825617 | Semiconductor processing apparatus | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Hideyuki Yamamoto | 2004-11-30 |
| 6771481 | Plasma processing apparatus for processing semiconductor wafer using plasma | Ryoji Nishio, Hideyuki Yamamoto, Akira Kagoshima | 2004-08-03 |
| 6747239 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Ryoji Nishio, Hideyuki Yamamoto | 2004-06-08 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Ryoji Nishio, Tsutomu Tetsuka, Junichi Tanaka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Hironobu Kawahara, Mitsuru Suehiro, Saburou Kanai, Toshio Masuda | 2004-01-13 |