Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830649 | Apparatus and method for producing semiconductors | Hideyuki Yamamoto, Yoshimi Torii, Tatehito Usui | 2004-12-14 |
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-12-07 |
| 6776872 | Data processing apparatus for semiconductor processing apparatus | Junichi Tanaka, Toshio Masuda, Shoji Ikuhara, Hideyuki Yamamoto | 2004-08-17 |
| 6771481 | Plasma processing apparatus for processing semiconductor wafer using plasma | Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2004-08-03 |
| 6745096 | Maintenance method and system for plasma processing apparatus etching and apparatus | Hideyuki Yamamoto, Toshio Masuda, Shoji Ikuhara, Junichi Tanaka | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2004-05-11 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Hiroyuki Kitsunai, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |