Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto +1 more | 2004-12-07 |
| 6776872 | Data processing apparatus for semiconductor processing apparatus | Junichi Tanaka, Toshio Masuda, Akira Kagoshima, Hideyuki Yamamoto | 2004-08-17 |
| 6745096 | Maintenance method and system for plasma processing apparatus etching and apparatus | Hideyuki Yamamoto, Toshio Masuda, Akira Kagoshima, Junichi Tanaka | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2004-05-11 |
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Kazuhiro Joo, Tetsuya Tahara, Shoji Okiguchi | 2004-03-30 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto +1 more | 2004-03-16 |