Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2004-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kouji Nishihata, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2004-03-30 |