Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki | 2004-09-21 |
| 6745093 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Tetsuya Tahara, Shoji Okiguchi, Hideki Yamasaki | 2004-06-01 |
| 6714832 | Operating method of vacuum processing system and vacuum processing system | Kazuhiro Joo, Shoji Ikuhara, Tetsuya Tahara, Shoji Okiguchi | 2004-03-30 |