Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2004-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Shigeru Nakamoto, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2004-09-21 |