Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shigeru Nakamoto, Shoji Okiguchi, Kouji Nishihata | 2004-09-21 |
| 6745093 | Vacuum process apparatus and method of operating the same | Tomoyuki Kawano, Kouji Nishihata, Tetsuya Tahara, Shoji Okiguchi | 2004-06-01 |