Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Junichi Tanaka, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-12-07 |
| 6747239 | Plasma processing apparatus and method | Junichi Tanaka, Ryoji Nishio, Seiichiro Kanno, Hideyuki Yamamoto | 2004-06-08 |
| 6743733 | Process for producing a semiconductor device including etching using a multi-step etching treatment having different gas compositions in each step | Junichi Tanaka, Takashi Fujii, Motohiko Yoshigai | 2004-06-01 |
| 6733618 | Disturbance-free, recipe-controlled plasma processing system and method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Junichi Tanaka +2 more | 2004-05-11 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |