Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815228 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Tatehito Usui, Takashi Fujii, Tetsunori Kaji | 2004-11-09 |
| 6743733 | Process for producing a semiconductor device including etching using a multi-step etching treatment having different gas compositions in each step | Hiroyuki Kitsunai, Junichi Tanaka, Takashi Fujii | 2004-06-01 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2004-01-13 |